| 铝掺杂氧化锌薄膜的电学及光学性能 |
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| 引用本文： | 刘耀东,李光玉,连建设. 铝掺杂氧化锌薄膜的电学及光学性能[J]. 吉林大学学报(工学版), 2007, 37(3): 495-0498 |
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| 作者姓名： | 刘耀东 李光玉 连建设 |
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| 作者单位： | 吉林大学,汽车材料教育部重点实验室,长春,130022;长春工业大学,材料科学与工程学院,长春,130012;吉林大学,汽车材料教育部重点实验室,长春,130022 |
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| 基金项目： | 国家重点基础研究发展计划(973计划) |
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| 摘 要： | 利用脉冲激光沉积法,在氧气氛下(氧分压为11 Pa)以石英玻璃为基体沉积了铝掺杂氧化锌薄膜。靶材选用锌铝合金靶,沉积过程中基体温度保持在150℃。研究了ZnO薄膜中铝的质量分数与薄膜电学性能和发光性能的关系。结果表明,掺杂铝的质量分数为1.37%时所获得的ZnO薄膜具有最小的电阻率和较强的紫外发光特性。
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| 关 键 词： | 材料实验 铝掺杂氧化锌薄膜 紫外发光 电学性能 脉冲激光沉积 |
| 文章编号： | 1671-5497（2007）03-0495-04 |
| 收稿时间： | 2006-06-12 |
| 修稿时间： | 2006-06-12 |
Effect of Al-doping on electrical and optical properties of ZnO films |
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| Liu Yao-dong,Li Guang-yu,Lian Jian-she. Effect of Al-doping on electrical and optical properties of ZnO films[J]. Journal of Jilin University:Eng and Technol Ed, 2007, 37(3): 495-0498 |
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| Authors: | Liu Yao-dong Li Guang-yu Lian Jian-she |
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| Affiliation: | 1. The Key Lab of Automobile Materials, Ministry of Education, Jilin University, Changchun 130022, China; 2. School of Materials Science and Engineering ,Changchun University of Technology ,Changchun 130012,China |
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| Abstract: | Aluminum-doped zinc oxide(AZO) thin films have been deposited on quartz glass substrates by pulsed laser deposition from ablating metallic targets in oxygen atmosphere(11 Pa of oxygen pressure) and under a substrate temperature of 150 ℃.The structural,electrical and optical properties of these films were investigated as a function of Al-doping content in the film.It was observed that 1.37% of Al content in the film is the optimum doping content that makes the film to achieve the minimum film resisitivity and strong ultraviolet emission. |
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| Keywords: | materials experiment aluminum-doped zinc oxide thin films ultraviolet emission electrical property pulsed laser deposition |
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