Evaluation of spatial resolution of spherical-planar-pair lensesfor elasticity measurement with microscopic resolution |
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Authors: | Nakaso N. Tsukahara Y. Chubachi N. |
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Affiliation: | Tech. Res. Inst., Toppan Printing Co. Ltd., Saitama; |
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Abstract: | The spatial resolution of spherical-planar-pair (SPP) lenses used in an ultrasonic microspectrometer (UMSM) was evaluated by scanning the lenses over a sharp edge of a specimen. The variation of the output observed in experiments was in good agreement with the theory. In the direction perpendicular to the propagation of a leaky surface acoustic wave (SAW), the best spatial resolution was obtained. The distance a90-10 over which the magnitude decreased from 90% to 10% was 5 μm at the frequency of 260 MHz. In the direction parallel to the leaky SAW propagation, the spatial resolution was severely affected by the excitation of the leaky SAW |
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