| 微加速度计粘附问题的研究及应用 |
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| 引用本文： | 俞必强,翁海珊,李疆. 微加速度计粘附问题的研究及应用[J]. 传感器与微系统, 2006, 25(6): 43-45,48 |
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| 作者姓名： | 俞必强 翁海珊 李疆 |
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| 作者单位： | 北京科技大学,机械工程学院,北京,100083 |
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| 摘 要： | 粘附是影响微机电系统(MEMS)可靠性的重要因素之一。针对MEMS的典型产品——微加速度计的粘附问题进行了研究,给出了2种典型的微加速度计的表征粘附特性的剥离数的表达式,并分析了将粘附条件应用于微加速度计的多学科设计优化之中,分析了其对系统结构设计产生的影响。
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| 关 键 词： | 粘附 剥离数 微加速度计 |
| 文章编号： | 1000-9787（2006）06-0043-03 |
| 收稿时间： | 2006-01-25 |
| 修稿时间： | 2006-01-25 |
Research and applications of adhesion in micromachined accelerometer |
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| YU Bi-qiang,WENG Hai-shan,LI Jiang. Research and applications of adhesion in micromachined accelerometer[J]. Transducer and Microsystem Technology, 2006, 25(6): 43-45,48 |
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| Authors: | YU Bi-qiang WENG Hai-shan LI Jiang |
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| Affiliation: | School of Mechanical Engineering,Beijing University of Science and Technology ,Beijing 100083, China |
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| Abstract: | Adhesion is one of the reliability problems in MEMS. The adhesion problem of the representative MEMS product-micromachined accelerometer is studied, and expressions of peel number are proposed to predict the adhesion-related performance for two kinds of micromachined accelerometers. The peel number is used in multidisciplinary design optimization of micromachined accelerometer,and its influence on the structure design is discussed. |
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| Keywords: | adhesion peel number micromachined accelerometers |
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