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激光打标系统及工艺研究
引用本文:周永飞,赵海峰,黄子强. 激光打标系统及工艺研究[J]. 电子设计工程, 2011, 19(2): 126-129
作者姓名:周永飞  赵海峰  黄子强
作者单位:电子科技大学,光电信息学院,四川,成都,610054
摘    要:为了将激光加工技术运用到液晶显示领域,采用激光光刻ITO栅指电极基板的技术。在明晰了该系统的性能基础上,根据需要对打标系统作了相应的改进与补充,即利用C8051F930单片机控制步进电机精确的定位和正反转运动,有效地克服了激光光刻时因高速出现的断线现象。文中分析了激光打标的工艺参数对打标线条宽度的影响曲线,有利于激光打标时参数的选择。实验证明本系统适应高质量打标的要求。系统通过PC机进行控制,操作灵活、方便且运行的平稳性及定位精度较高,从而使激光打标工艺能够更好地应用于液晶显示领域中。

关 键 词:激光技术  C8051F930  激光打标  液晶  氧化铟锡

Laser lithography system and its technological research
ZHOU Yong-fei,ZHAO Hai-feng,HUANG Zi-qiang. Laser lithography system and its technological research[J]. Electronic Design Engineering, 2011, 19(2): 126-129
Authors:ZHOU Yong-fei  ZHAO Hai-feng  HUANG Zi-qiang
Affiliation:(School of Optoelectronic Information,University of Electronic Science and Technology of China,Chengdu 610054,China)
Abstract:In order to use laser technology to the liquid crystal display field,technology of laser light of a gate electrode ITO to the board was used.Based on understanding of the system’s performance,according to the need,the corresponding improvements and supplements were made to the system,which is using C8051F930 MCU to control exact location and positive and negative inversion of the stepping motor.This overcomes the phenomenon of the line broken which is due to high speed of laser lithography.This paper analyzes the influence curve of laser parameters to the line width of tagging,which is beneficial to choice of laser marking parameters.Experiments prove that this system meets the quality requirements.Through the control of PC,this system operates flexible and convenient,and has a high running smoothness and positioning accuracy.So the laser lithography technics can better apply in liquid crystal display field.
Keywords:laser technology  C8051F930  laser lithography  LCD  ITO
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