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Interfacial Electronic Structure of Thin Cu Films Grown on Ar^+—ion Sputter—cleaned α—Al2O3 Substrates
引用本文:Christina Scheu,Min Gao,Manfred Rühle. Interfacial Electronic Structure of Thin Cu Films Grown on Ar^+—ion Sputter—cleaned α—Al2O3 Substrates[J]. 材料科学技术学报, 2002, 18(2): 117-120
作者姓名:Christina Scheu  Min Gao  Manfred Rühle
作者单位:Max-Planck-InstitutfuerMetallforschungSeestr.92,70174Stuttgart,Germany
摘    要:The bonding and electronic structure of Cu/(0001)Al2O3 and Cu/(1120)Al2O3 interfaces has been studied experimentally using spatially-resolved transmission electron energy loss spectroscopy.The specimen were prepared by depositing Cu on single-crystal α-Al2O3 substrates,which have been Ar^ -ion sputter-cleaned prior to the growth of Cu.For both orientations of theα-Al2O3 substrate,atomically abrupt interfaces formed as determined by high-resolution transmission electron microscopy.The investigations of the interfacial Cu-L2,3,Al-L2,3 and O-K energy loss near-edge structures,which are proportional to the site-and angular-momentum-projected unoccupied density of states above the Fermi level,indicate the existence of metallic Cu-Al bonds at the Cu/Al2O3 interface independent of the substrate orientation.

关 键 词:氧化铝基底 铜薄膜 薄膜生长 电子结构

Interfacial Electronic Structure of Thin Cu Films Grown on Ar+-ion Sputter-cleaned a-Al2O3 Substrates
Christina Scheu,Min Gao. Interfacial Electronic Structure of Thin Cu Films Grown on Ar+-ion Sputter-cleaned a-Al2O3 Substrates[J]. Journal of Materials Science & Technology, 2002, 18(2): 117-120
Authors:Christina Scheu  Min Gao
Affiliation:Max-Planck-Institut für Metallforschung, Seestr. 92, 70174 Stuttgart, Germany
Abstract:The bonding and electronic structure of Cu/(0001)Al2O3 and Cu/(1120)Al2O3 interfaces has been studied experimentally using spatially-resolved transmission electron energy loss spectroscopy. The specimen were prepared by depositing Cu on single-crystal α-Al2O3 substrates, which have been Ar+-ion sputter-cleaned prior to the growth of Cu. For both orientations of the α-Al2O3 substrate, atomically abrupt interfaces formed as determined by highresolution transmission electron microscopy. The investigations of the interfacial Cu-L2,3, AI-L2,3 and O-K energy loss near-edge structures, which are proportional to the site- and angular-momentum-projected unoccupied density of states above the Fermi level, indicate the existence of metallic Cu-AI bonds at the Cu/AI2O3 interface independent of the substrate orientation.
Keywords:Electronic structure  Cu film  Ion sputtering
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