A high-power long pulse excimer laser |
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| Authors: | T.J. McKee G. Boyd T.A. Znotins |
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| Affiliation: | Lumonics Inc., Kanata, Ont., Canada; |
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| Abstract: | Excimer lasers operating at high average powers are becoming important for materials-processing applications. A long-pulse excimer laser with automatic spark preionization which provides a pulse energy of 1 J with an optical pulse length of 200 ns full-width half-maximum for XeCl is described. Successful scaling of the repetition rate to 220 p.p.s. is discussed along with requirements for gas flow.<> |
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