Residual charges and infrared absorption in electrochromic WO3 films prepared by hydrogen-introduced sputtering

Electrochromic WO₃ films were prepared by rf−sputtering in atmosphere consisting of Ar/H₂/O₂ mixed gas. The as-sputtered films require several times of injection/extraction of ions (the aging) for obtaining reversible coloration/bleaching. After the aging, there are ions (protons) remaining in the films, namely residual charges. From the results of IR absorption of the as-sputtered and aged films, the residual charges contribute to create OH and HOH bonds. Hydrogen introduced in the films during sputtering is transformed only into OH bonds combining with unstable oxygen in the films. The introduced hydrogen is considered to suppress the growth of grain in WO₃ films from AFM observation.