微米、纳米尺度测量环境的温度测量和控制技术

真空法和空调法是精密测量环境温度高稳定度和均匀度的主要构建方法.讨论了多热源温场控制的解耦问题,考虑到空气温度控制模型的复杂性和非精确性,依靠先验知识的不完全解耦方法仍将在工程应用中居于主流地位.高精度温度测量一般依赖于测量精度高的铂电阻等温度传感器完成,但自然对流条件下的空气流动性差,应考虑热电阻工作中的自热现象.热电偶和石英温度传感器可能是该条件下温度测量的一种可考虑的选择.

Temperature Measurement and Control of the Micro-and Nano - Scale Measurement Environment

Among the methods to construction an environment temperature with a high stability and uniformity, vacuum manner and air-conditioning manner are the two major ways for the micro-and nano-scale measurement. The decoupling control methods are discussed for the system with multi-heat sources. Considering the complexity and non-precision of the air thermal control model, partly decouple method, which relies on the experience, is still an important method for the system with multi-heat sources. In general, a high-precision low temperature measurement can be realized by a platinum resistance temperature sensor (PRTS) with the high accuracy. But due to air natural convection, the self-heating effectiveness of PRTS should be considered. Hence, the quartz and thermocouple may be considered to measure the temperature under the micro and nano-scale measurement environment.