宽范围大曲率半径数字化非接触测量系统

本文提出了一种新颖的利用激光偏振干涉体系产生非接触的牛顿环并与CCD图像处理技术相结合的测量方法。可测量的曲率半径为1～25m，具有很宽的测量范围；非接触测量不会损坏高精度表面；并可测试任意反向率的凹、凸球面，而测试体系结构却非常紧凑。干涉条纹经计算机数据处理可自动、快速获得测量结果。经误差分析，测量的相对误差△R/R优于0.3%。

A Digitalization Measurement System of Longer Radius of Curvature by a Non-contact Method

A digitalization measurement system of longer radius of curvature with wide region is presented in this paper. Non contact Newton's rings are formed by an interferometer. The testing system of radius of curvature has following characteristics and advantages. First the testing system of non-contact Newton's rings can not scratche and damages the precision surface. Second the radius of curvature of spherical surface detected not only can be both convex and concave but also the region of measurement is up to 25 Meter at the same time its structure is very compact. Last the accuracy of measurement is better than 0 3 percent using CCD imaging and the digitalization technique of interference fringes.