塑料微流控芯片的制作及其自动化

实现塑料微流控芯片制作的自动化能够大幅度降低制作成本，稳定芯片质量，并使芯片具有较好的一致性，是推广应用、实现产业化所亟待解决的重要问题。本文简要介绍了微流控芯片的发展现状，指出影响其推广应用的主要障碍及所面临的主要问题。阐述了实现塑料微流控芯片制作自动化的意义。简述了制作塑料微流控芯片的两种主要方法——模塑法和热压法，分析了热压法制作塑料微流控芯片的工艺过程及其实现自动化所需解决的诸如自动脱片、基片与盖片的自动对准及预联接等技术问题。介绍了大连理工大学微系统研究中心同北京航空航天大学机器人研究所合作研制开发的塑料(PMMA)微流控芯片的自动化制造系统，并简要说明了主要的组成设备。

Plastic Microfluidic Chips and Its Automatic Fabrication

Automatic fabrication of plastic microfluidic chips reduces cost, keeps high quality and makes chips of uniform. It is the key for extending the chip's application and realizing industrialization. The state of the art development of microfluidic chips is briefly reviewed, the problems obstructing practical applications are discussed and the significance of automatic fabrication is given. Two fabrication methods, i.e. mold casting and hot embossing, are explained. The fabrication procedure of hot embossing is analyzed, the problems and solutions related to automation, such as automatic demolding, automatic alignment and pre bonding of plastic chip's substrate and cover, are discussed. With the cooperation of Robot Research Institute, Beijing University of Aeronautics and Astronautics, the Research Center for Micro System Technology, Dalian University of Technology, developed an automatic fabrication system for plastic microfluidic chips. The key equipments of the system are briefly explained.