| 标准中氦质谱检漏试验判据的研究 |
| |
| 引用本文： | 金毓铨. 标准中氦质谱检漏试验判据的研究[J]. 电子产品可靠性与环境试验, 2011, 29(3): 1-3 |
| |
| 作者姓名： | 金毓铨 |
| |
| 作者单位： | 中国电子科技集团公司第五十五研究所,江苏,南京,210016 |
| |
| 摘 要： | 通过计算,指出美国军用标准MIL-ST0-750E<半导体器件试验方法>的方法1071.8中的氨质谱检漏的固定方法和灵活方法判据的宽严程度有明显的差异,多数情况下超过一个数量级.建议在参考此类标准和执行类似标准时应加以注意.
|
| 关 键 词： | 军用标准 密封 气密性 氮质谱检漏 灵活方法 |
Study on the Failure Criteria for Helium Mass Spectrum Fine Leak in the Standards |
| |
| JIN Yu-quan. Study on the Failure Criteria for Helium Mass Spectrum Fine Leak in the Standards[J]. Electronic Product Reliability and Environmental Testing, 2011, 29(3): 1-3 |
| |
| Authors: | JIN Yu-quan |
| |
| Affiliation: | JIN Yu-quan(No.55 Research Institute of China Electronics Technology Group Corporation,Nanjing 210016,China) |
| |
| Abstract: | It is found that there is a distinct difference in the failure criteria between the fixed method and the flexible method for Helium mass spectrum leak in Test Method 1071.8 of MIL-STD-750E Test methods for semiconductor devices,and the difference is more than one order of magnitude in most cases.It is recommended to pay more attentions to this case in reference and implementation of this and similar standards. |
| |
| Keywords: | military standard seal hermeticity Helium Mass Spectrum Leak flexible method |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
