| 用于强流离子注入机的磁分析器电源设计 |
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| 引用本文： | 孙雪平. 用于强流离子注入机的磁分析器电源设计[J]. 微细加工技术, 1997, 0(4): 19-24 |
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| 作者姓名： | 孙雪平 |
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| 作者单位： | 电子部第四十八研究所!长沙，410111 |
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| 摘 要： | 本文简要介绍了该电源的指标及电路．并详细论述了提高电源稳定度和可靠性的方法和措施，最后给出了测试结果和运行情况。
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| 关 键 词： | 强流离子注入机 磁分析器电源 稳定度 可靠性 |
DESIGN OF HIGHLY STABLE AND RELIABLE POWER SUPPLY FOR ANALYZER OF HIGH-CURRENT ION IMPLANTER |
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| Sun Xueping. DESIGN OF HIGHLY STABLE AND RELIABLE POWER SUPPLY FOR ANALYZER OF HIGH-CURRENT ION IMPLANTER[J]. Microfabrication Technology, 1997, 0(4): 19-24 |
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| Authors: | Sun Xueping |
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| Affiliation: | The 48th Research Institute of the Ministry of Electronics Industry. Changsha 410111 |
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| Abstract: | The main technical specifications and the circuit principle blockdiagram of analyzer power supply are briefly described. Especially the methods and measures to enhance its stability and reliability are discussed. Finally,the results of test and operation are given. |
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| Keywords: | high-current ion implanter analyzer power supply stability reliability |
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