非致冷红外焦平面阵列用铁电薄膜

在简要阐述红外成像发展现状基础上，系统介绍了铁电薄膜的性质、制备及在非致冷红外热成像系统应用中的一些热点问题。重点介绍当前有重大技术突破的介质测辐射热式焦平面探测器，比较了热释电模式、介电模式的优缺点及发展前景。由于介质测辐射热式信号获得方式较热释电式有较高的比探测率、响应率、成象精度和质量及较轻的体积和重量，可以预测在不断提高探测用铁电薄膜介电温度系数、损耗及大面积均匀性，不断改进其读出电路的基础上，将成为今后铁电非致冷红外热成像发展的主流。

Ferroelectric Thin Films Applied in Uncooled Infrared Focal Plane Array

Recent studies on ferroelectric films applied in uncooled infrared focal plane arrays, including dielectric bolometers and pyroelectric bolometers, were reviewed. Development on the dielectric bolometer was introduced emphatically for its excellent properties. In long run, dielectric bolometer could be the mainstream of uncooled infrared imagers as long as properties of the ferroelectric films and the read-out electric circuit are improved continuously.