基因芯片中的微电子刻蚀技术

基因芯片是运用微电子加工技术以及基因分子的自组装技术在微小芯片上组装成千上万个不同的DNA微阵列，实现以基因为主的生命信息的大规模检测。本文利用氧化、光刻、蒸发、溅射等一系列集成电路刻蚀技术，研究了适于电化学检测的基因芯片微阵列的制备，并提出了这种芯片中微流路的制备工艺方案。

The Microelectronic Etching Techniques in Gene - chip

Gene- chip adopt microelectronic process technology and gene molecule's self assembly technique, to generate large amount of DNA microarrays, can make the large scale of identification of life information based on genes. A series of etching technology on IC, such as oxidization, photolithography, evaporation and sputtering, have been adopted, to make study on the manufacturing of DNA microarrays which is propitious to electrochemistry detection and analyzing. And the manufacturing scheme of the microfluidic circuit based on golden electrode is proposed.