| AlN陶瓷的薄膜金属化及其与金属的焊接研究 |
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| 引用本文： | 鲁燕萍,高陇桥. AlN陶瓷的薄膜金属化及其与金属的焊接研究[J]. 真空科学与技术学报, 2000, 20(3): 190-193 |
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| 作者姓名： | 鲁燕萍 高陇桥 |
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| 作者单位： | 信息产业部电子第十二研究所!北京100016 |
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| 摘 要： | 针对AlN陶瓷在微波管中的应用特点 ,采用磁控溅射镀膜方法对AlN陶瓷进行表面金属化 ,并与无氧铜焊接 ,测试焊接体的抗拉强度并对陶瓷 金属接合界面进行了微观分析。
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| 关 键 词： | 磁控溅射 焊接 抗拉强度 微观分析 |
Surface Metallization and Welding of Aluminum Nitride Ceramic |
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| Lu Yanping,Gao Longqiao. Surface Metallization and Welding of Aluminum Nitride Ceramic[J]. JOurnal of Vacuum Science and Technology, 2000, 20(3): 190-193 |
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| Authors: | Lu Yanping Gao Longqiao |
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| Abstract: | Metal films were grown on aluminum nitride (AlN) ceramic by magnetron sputtering for the purposes of joining AlN ceramic and copper by welding to fabricate parts of microwave tube.Tensile strength and the microstructures at the welded joints were studied. |
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| Keywords: | Magnetron sputtering Welding Tensile strength Microstructure analysis |
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