Testing aspheric lenses: New approaches |
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Authors: | W. Osten B. Dörband E. Garbusi Ch. Pruss L. Seifert |
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Affiliation: | 1.Institut für Technische Optik,Universit?t Stuttgart,Stuttgart,Germany;2.Carl Zeiss SMT AG,Oberkochen,Germany |
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Abstract: | Optical metrology provides a unique approach to measuring surfaces, both technical and optical, over a wide measurement range from macro to nano. We present two new approaches to measuring aspheric lenses with increased flexibility. The first is based on a modified Twyman-Green interferometer where multiple sources for the illumination of the aspheric surface with different angles are adopted to achieve a local compensation of the gradient and consequently a reduction of interference fringes. The second is based on a chromatic Fizeau interferometer with a diffractive element as null-optic for the measurement of extreme ultraviolet aspheres. |
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