| 双层辉光等离子多元共渗源极成分设计 |
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| 引用本文： | 张艳梅,李忠厚,徐重.双层辉光等离子多元共渗源极成分设计[J].金属热处理,2009,34(11). |
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| 作者姓名： | 张艳梅 李忠厚 徐重 |
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| 作者单位： | 1. 广东工业大学,材料与能源学院,广东,广州,510006
2. 太原理工大学,表面工程研究所,山西,太原,030024 |
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| 基金项目： | 国家自然科学基金，广东工业大学博士启动基金 |
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| 摘 要： | 以工业纯铁表面形成Fe-11W-7Mo-23Co型合金为例,阐述了双层辉光离子多元共渗的源极成分设计思路.通过对工业纯铁表面进行W、Mo、Co多元共渗,探讨了合金元素溅射产额的不同对源极溅射成分的影响.结果表明,双层辉光离子多元共渗时,源极成分设计可以忽略合金元素溅射产额的影响.
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| 关 键 词： | 双层辉光等离子渗金属 W、Mo、Co多元共渗 源极成分设计 |
Source cathode composition design in multi-element surface alloying by double glow plasma technique |
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| ZHANG Yan-mei,LI Zhong-hou,XU Zhong.Source cathode composition design in multi-element surface alloying by double glow plasma technique[J].Heat Treatment of Metals,2009,34(11). |
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| Authors: | ZHANG Yan-mei LI Zhong-hou XU Zhong |
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| Abstract: | Source cathode composition design was investigated in multi-element surface alloying by double glow plasma technique with the example of forming Fe-11W-7Mo-23Co alloy in surface of pure iron.The influence of different element sputtering rates on sputter produce was discussed by W-Mo-Co co-diffusion.The experiment results show that the influence of different element sputtering rates can be neglected in source cathode composition design. |
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| Keywords: | double glow plasma surface alloying W Mo Co co-diffusion source cathode compositions design |
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