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压电驱动三维超微定位平台的性能研究
引用本文:刘国华,李亮玉. 压电驱动三维超微定位平台的性能研究[J]. 压电与声光, 2007, 29(3): 289-291
作者姓名:刘国华  李亮玉
作者单位:天津工业大学,机电学院,天津,300160
摘    要:提出一种以柔性铰链结构为导向机构、压电陶瓷为驱动器的三维超微定位工作台,对三维超微定位工作台的非线性和动态特性的问题进行了研究,提出改善方法以提高系统的定位性能。将三维超微定位平台用于微操作机械手。

关 键 词:压电陶瓷微位移器  三维超微定位  PID算法  动态特性  非线性  柔性铰链
文章编号:1004-2474(2007)03-0289-03
修稿时间:2006-02-20

Study on the Performance of 3D Ultra-micropositioning System with PZT
LIU Guo-hua,LI Liang-yu. Study on the Performance of 3D Ultra-micropositioning System with PZT[J]. Piezoelectrics & Acoustooptics, 2007, 29(3): 289-291
Authors:LIU Guo-hua  LI Liang-yu
Affiliation:School of Mechnical and Electronic Engineering,Tianjin Poly Technic University,Tianjin,300160
Abstract:The Paper proposes 3D ultra-micropositioning mechanism,which is composed of flexible hinge mechanism and piezoelectric actuator.The non-linearity characteristics and dynamic characteristics of ultra-micropositioning mechanism are analyzed in theory and studied by experiment.To meet the need of high-precision positioning,a digital PID feedback controller is adopted to improve the performance of the ultra-micropositioning system.Finally,this system is used in manipulator.
Keywords:piezoelectric actuator  3D ultra-micropositioning  PID algorithm  dynamic characteristics  non-linearity  flexible hinge
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