基于实时监测的激光外差干涉仪闲区误差自动补偿

针对目前激光外差干涉实时测量中,由于现场工作环境的限制,无法对闲区误差进行实时自动补偿的问题,提出了一种基于实时测量闲区值和折射率值的闲区误差补偿方法.该补偿方法以激光测距仪为主体,结合偏振片、偏振旋转器对闲区长度值进行测量,利用空气折射率测量仪获得测量过程中的空气折射率数值,并根据终端修正原则,取每次测量开始和结束时的折射率数值与清零时的闲区值对干涉测量结果进行修正.可有效降低实时测量中由折射率变化所引起的闲区误差对测量结果的影响,实验表明,本方法在折射率变化2.7×10-6,闲区值为100 mm的情况下,对HP5528干涉系统进行补偿后使零点漂移最大值从300 nm减小到30 nm.

Automatic real-time compensation of vacant band error based on monitor the laser heterodyne interferometry timely

In order to compensate the vacant band error automatically and timely in the real-time measurement,a method based on measuring the value of the refractive index and length of the vacant band timely is proposed.The method uses the laser ranger,polarization film and polarization rotator to buildup the metrical apparatus and measure the length value of vacant band,uses the refractive index metrical apparatus to get the value of the refractive index,then according to the end correction method the vacant band er...