| 硅微仿生矢量水声传感器研制 |
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| 引用本文： | 谢斌,薛晨阳,张文栋,熊继军,张斌珍,陈尚. 硅微仿生矢量水声传感器研制[J]. 传感技术学报, 2006, 19(5): 2300-2303 |
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| 作者姓名： | 谢斌 薛晨阳 张文栋 熊继军 张斌珍 陈尚 |
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| 作者单位： | 中北大学电子测试技术国家重点实验室,太原,030051 |
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| 基金项目： | 国家自然科学基金，山西省自然科学基金，高等学校博士学科点专项科研项目 |
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| 摘 要： | 根据鱼类侧线听觉仿生学原理,设计出硅微仿生矢量水声传感器结构.该传感器结构包括高精度压阻式硅微换能单元结构和空芯光子晶体光纤柱体.讨论了水声传感器结构的仿生学原理和声学原理.用有限元软件Ansys分析传感器的应力分布,讨论了传感器的加工工艺,并采用气流静态加载法测试出传感器的矢量指向性图,测试结果表明,仿生水声传感微结构具有“8字型“矢量指向性.
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| 关 键 词： | 仿生学 矢量水声传感器 微机电器件 |
| 文章编号： | 1004-1699(2006)05-2300-04 |
| 修稿时间： | 2006-07-01 |
Design of a Bionic Vector Hydrophone Based on Silicon |
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| XIE Bin,XUE Chen-Yang,ZHANG Wen-Dong,XIONG Ji-Jun,ZHANG Bin-Zhen and CHEN Shang. Design of a Bionic Vector Hydrophone Based on Silicon[J]. Journal of Transduction Technology, 2006, 19(5): 2300-2303 |
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| Authors: | XIE Bin XUE Chen-Yang ZHANG Wen-Dong XIONG Ji-Jun ZHANG Bin-Zhen CHEN Shang |
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| Affiliation: | National Key Laboratory For Electronic Measurement Technology,North University of China, Taiyuan, 030051, CHN |
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| Abstract: | According to the auditory principle of fish's stereocilium, a bionic hydrophone based on silicon is designed. It consists of a high precision piezoresistive unit and an air-core photonic crystal fiber pole. The principle of bionics and hydroacoustics about vector hydrophone has been discussed, The distribution of stress has been performed with FEM (Finite Element Method) simulator, and the fabrication has been researched. The vector direction has been measured under air-flow static load. The result shows that the structure has'8 shape' vector direction. |
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| Keywords: | bionics vector hydrophone MEMS |
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