| 基于碳纳米管场发射的压力传感器仿真与设计 |
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| 引用本文： | 赵海涛,陈吉安,王全保,范振民. 基于碳纳米管场发射的压力传感器仿真与设计[J]. 传感器与微系统, 2011, 30(10): 123-126 |
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| 作者姓名： | 赵海涛 陈吉安 王全保 范振民 |
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| 作者单位： | 上海交通大学空天科学技术研究院,上海,200240 |
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| 基金项目： | 国家“863”计划资助项目(2009AA04Z303) |
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| 摘 要： | 碳纳米管是场发射阴极的极佳材料.基于碳纳米管和金属铜的复合电镀技术,采用有限元软件对压力传感器的碳纳米管布设进行了有限元仿真,使用模拟退火算法对阳极变形膜的尺寸进行了优化,并设计了实现压力传感器的工艺过程.碳纳米管的管径在不影响电镀质量的情况下可尽量小,选取的长度不影响直立,间距在500 nm时可获得最大电流.阳极膜的...
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| 关 键 词： | 压力传感器 碳纳米管 复合电镀 有限元仿真 优化设计 |
Simulation and design of pressure sensor based on carbon nanotubes field emission |
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| ZHAO Hai-tao,CHEN Ji-an,WANG Quan-bao,FAN Zhen-min. Simulation and design of pressure sensor based on carbon nanotubes field emission[J]. Transducer and Microsystem Technology, 2011, 30(10): 123-126 |
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| Authors: | ZHAO Hai-tao CHEN Ji-an WANG Quan-bao FAN Zhen-min |
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| Affiliation: | ZHAO Hai-tao,CHEN Ji-an,WANG Quan-bao,FAN Zhen-min(School of Aeronautics and Astronautics,Shanghai Jiao Tong University,Shanghai 200240,China) |
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| Abstract: | Carbon nanotubes are excellent materials of field emission cathode.Based on the carbon nanotubes and copper composite electroplating technology.The layout of the carbon nanotubes of pressure sensors is simulated using FEM,the size of the anode membrane is optimized using simulation annealing algorithm and pressure sensor process are designed and achieved.In the case of no affecting the electroplating quality,diameter of the carbon nanotubes can be as small as possible,and without affecting the vertical for ... |
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| Keywords: | pressure sensor carbon nanotubes composite electroplating finite element simulation optimal design |
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