垂直纳米光栅耦合器耦合效率分析与测试

介绍了基于Sol纳米光栅耦合器的理论研究及测试方法,系统研究了光栅参数对光栅耦合效率的影响,在占空比为1:1的基础上,对不同光栅槽深作了相应的理论分析,同时,还对不同角度的入射光作了相应的研究,经过仿真在入射角为10°时,对于波长为l 550 nm的入射光其耦合效率最高.除此之外,通过在光栅表面添加增透膜使其耦合效率在...

The Coupling Efficiency Analysis and Testing of Vertical nano Grating Coupler

We discuss the theory research and testing methods of a nano grating coupler based on SOI(Silicon-on-Insulator).The grating coupling efficiency of parameters and the corresponding theoretical simulation was studied systematically,especially the dependence of the influence of grating etching with a duty cycle of 50%.Angles of the incident light were also researched.It is found that 10°of the incident light get the highest efficiency at 1 550 nm wavelength.Meanwhile,the coupling efficiency in theory can be improved to 76% using an optimized grating design and adding film which can effectively reduce the input light reflection and its leak scattering.The fabrication of the Si waveguide nano-grating coupler in Silicon-on-Insulator is focusing on ion beam method(FIB).Using single-mode NewFocus laser with an adjustable extent of 1 520 nm～1 570 nm as the excitation optical source,a vertical coupler of Si waveguide grating is achieved through coupling to a single-mode fiber.The measured 1 dB bandwidth is approximately 30 nm and the maximum transmission measured is approximately 32%.