|
|||||
|
|
| 气体检测中基于MEMS技术的近红外光谱仪设计 | |
| 引用本文： | 苏雷龙,蒋书波,程明霄,何野,徐波,李晟.气体检测中基于MEMS技术的近红外光谱仪设计[J].传感器与微系统,2011,30(10). |
| 作者姓名： | 苏雷龙 蒋书波 程明霄 何野 徐波 李晟 |
| 作者单位： | 1. 南京工业大学自动化与电气工程学院精密仪器研究所,江苏南京,211816 2. 南京工业大学高技术研究院,江苏南京,211816 3. 江苏英特神斯科技有限公司,江苏南京,211816 |
| 摘 要： | 根据传统近红外光谱仪的不足,利用MEMS微镜设计了近红外光谱仪的光路,并给出了仪器的设计框架,设计了仪器的上位机程序;利用单色仪和29.4%的甲烷气体样品和对样机进行测试,实验结果表明:在10～35℃内,仪器波长稳定性小于2 nm,并能够观测到甲烷在1650 nm附近吸光度约为0.01的吸收峰。MEMS技术应用在近红外光谱仪中,对于气体检测是可行的,并且能够使仪器做到便携式。 |
| 关 键 词： | MEMS微镜 气体分析 便携式 近红外光谱仪 |
Design on NIR spectrometer based on MEMS technology for gas detecting |
|
| SU Lei-long,JIANG Shu-bo,CHENG Ming-xiao,HE Ye,XU Bo,LI Sheng.Design on NIR spectrometer based on MEMS technology for gas detecting[J].Transducer and Microsystem Technology,2011,30(10). | |
| Authors: | SU Lei-long JIANG Shu-bo CHENG Ming-xiao HE Ye XU Bo LI Sheng |
| Affiliation: | SU Lei-long1,JIANG Shu-bo1,CHENG Ming-xiao1,HE Ye2,XU Bo3,LI Sheng3(1.Institute of Precision Instruments,College of Automation and Electrical Engineering,Nanjing University of Technology,Nanjing 211816,China,2.Institute of High-Technology,3.Jiangsu Intellisence Technology Co.Ltd,China) |
| Abstract: | According to the deficiency of traditional NIR spectrometer,a light path of NIR spectrometer by MEMS micro-mirror,overall framework and the computer program are designed.The instrument tested by monochromator and CH4 gas of 29.4 %.The results show that between 10 ~35 ℃,wavelength stability can be reached within 2 nm and an absorption peak of 0.01 absorbency of CH4 near 1 650 nm can also be observed.The MEMS micro-mirror can be applied in the NIR spectrometer for gas detecting,and it makes the instrument portable. |
| Keywords: | MEMS micro-mirror gas analysis portable type NIR spectrometer |
| 本文献已被 CNKI 万方数据 等数据库收录！ | |