| Love波传感器的分析与测试 |
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| 引用本文： | 李正刚,苗圃,李锋,吴一辉.Love波传感器的分析与测试[J].传感器与微系统,2011,30(9):143-145,152. |
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| 作者姓名： | 李正刚 苗圃 李锋 吴一辉 |
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| 作者单位： | 1. 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033;中国科学院研究生院,北京100039
2. 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春,130033 |
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| 基金项目： | 国家自然科学基金资助项目(60871043) |
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| 摘 要： | 为了制作出具有高灵敏度的Love波传感器,分析了Love波在ST石英和二氧化硅薄膜分层结构中的传播特性,并对该分层结构进行了相关的理论推导和计算.从该结构的声学动力学方程出发,分析求解了该分层结构的波动方程,并得到了在该分层结构的色散关系式和结构中的位移表达式.然后在所得到的解析表达式的基础上进行了相应的波结构分析和特...
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| 关 键 词： | Love波 色散曲线 质量灵敏度 循环伏安法 |
Analysis and measurement of Love wave sensor |
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| LI Zheng-gang,MIAO Pu,LI Feng,WU Yi-hui.Analysis and measurement of Love wave sensor[J].Transducer and Microsystem Technology,2011,30(9):143-145,152. |
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| Authors: | LI Zheng-gang MIAO Pu LI Feng WU Yi-hui |
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| Affiliation: | LI Zheng-gang1,2,MIAO Pu1,LI Feng1,WU Yi-hui1(1.State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China,2.Graduate School of Chinese Academy of Sciences,Beijing 100039,China) |
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| Abstract: | In order to get the propagation characteristics of Love wave in the layered structure consists of ST-quartz and silica,and fabricate the Love wave biosensor with higher sensitivity,theoretical derivation and numerical computations have been achieved.The wave equations have been solved from the dynamic equations of the layered structure.The expressions of displacement field have been derived with the dispersion curve of the Love wave in this structure.Based on the analytical expressions which have been deriv... |
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| Keywords: | Love wave dispersion curve mass sensitivity cyclic voltammetry method |
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