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| PLD制备钛酸铅薄膜过程的RHEED分析 | |
| 引用本文： | 葛芳芳,白黎,吴卫东,曹林洪,沈军. PLD制备钛酸铅薄膜过程的RHEED分析[J]. 真空科学与技术学报, 2009, 29(4). DOI: 10.3969/j.issn.1672-7126.2009.04.01 |
| 作者姓名： | 葛芳芳 白黎 吴卫东 曹林洪 沈军 |
| 作者单位： | 1. 同济大学物理系,上海,216900;中国工程物理研究院激光聚变研究中心,绵阳,621900 2. 中国工程物理研究院激光聚变研究中心,绵阳,621900 3. 同济大学物理系,上海,216900 |
| 基金项目： | 国家高技术研究发展计划(863计划) |
| 摘 要： | 本文采用反射式高能电子衍射(RHEED)监测脉冲激光沉积法制备钛酸铅薄膜过程.根据PbTiO3/MgO(001)薄膜、PbTiO3/Si(100)薄膜生长过程中RHEED强度的时间演变,分析基片对薄膜生长模式的影响.并且观测不同生长时刻的RHEED强度的空间分布,讨论生长过程中薄膜表面的台阶尺寸变化.另外,比较在不同氧分压下沉积的钛酸铅薄膜表面的RHEED图案,发现氧气将改变薄膜的微结构,提高薄膜的结晶性. |
| 关 键 词： | 钛酸铅薄膜 脉冲激光沉积 生长模式 |
Reflection High Energy Electron Diffraction Study of Pulsed Laser Deposited PbTiO3 Films |
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| Ge Fangfang,Bai Li,Wu Weidong,Cao Linhong,Shen Jun. Reflection High Energy Electron Diffraction Study of Pulsed Laser Deposited PbTiO3 Films[J]. JOurnal of Vacuum Science and Technology, 2009, 29(4). DOI: 10.3969/j.issn.1672-7126.2009.04.01 | |
| Authors: | Ge Fangfang Bai Li Wu Weidong Cao Linhong Shen Jun |
| Abstract: | The PbTiO3 epitaxial growth by pulsed laser deposition(PLD) was monitored in-situ with reflection high energy electron diffraction (RHEED),on substrates of MgO(001) and Si(100).The impacts of deposition time,oxygen partial pressure and substrate specimen on the growth mode and microstructures of the films were studied.The results show that the substrate specimen and the oxygen partial pressure strongly affect the growth modes and microstructures of the films.For example,the PbTiO3 films grew in layer-to-island mode on MgO(001) with increased density of steps but in island mode on Si(100),possibly because the Si lattice mismatch of 3% is much higher than 0.662% of MgO,and because of the interfacial reaction of Si and PbTiO3.An appropriate oxgen partial pressure improves the compactness and recrystalization of PbTiO3 films. |
| Keywords: | RHEED PbTiO3 film Pulsed laser deposition RHEED Growth model |
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