| GKJ-1.8m激光自动线位移刻检系统检测长光栅传感器误差分析及评定 |
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| 引用本文： | 赵安太.GKJ-1.8m激光自动线位移刻检系统检测长光栅传感器误差分析及评定[J].光电工程,1999(Z1). |
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| 作者姓名： | 赵安太 |
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| 作者单位： | 中国科学院光电技术研究所!四川成都６１０２０９ |
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| 摘 要： | 对"ＧＫＪ－１．８ｍ激光自动线位移刻检系统"进行了较系统的误差分析,用仪器的系统误差和随机误差合成的方法,评定本仪器测试长光栅传感器光栅位置误差的不确定度．
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| 关 键 词： | 光栅检验 光栅传感器 光栅检查仪 误差分析 |
Error Analysis and Evaluation for Grating Detecting Sensor with GKJ-1.8m Laser Automatic Linear Displacement Graduation and Detecting System |
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| ZRAO An-tai.Error Analysis and Evaluation for Grating Detecting Sensor with GKJ-1.8m Laser Automatic Linear Displacement Graduation and Detecting System[J].Opto-Electronic Engineering,1999(Z1). |
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| Authors: | ZRAO An-tai |
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| Abstract: | An error analysis is carried out for "GKJ-1.8m laser automatic lineardisplacement graduation and detecting system" in the paper. The uncertainty of theinstrument in testing grating sensor is evaluated by means of the synthesizing of systemerror and random error. |
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| Keywords: | Grating testing Grating sensors Grating inspection devices Error analysis |
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