| Design and Fabrication of Hybrid Piezomotor Applied in Precision Positioning Devices |
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| 作者姓名： | CHENG Dong-ming DUAN Zhi-yong MA Feng-ying GONG Qiao-xia |
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| 作者单位： | School of Physics and Engineering, Zhengzhou University, Zhengzhou 450052, CHN |
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| 摘 要： | The motor＇s configuration is designed and the dynamic analysis equations based on its simplified model are deduced. A testing system utilizing grating is set up to test this new motor, and the theoretical movement principle for the motor is proved by experiments. The pulse waveforms are applied to drive the motor to move in steps. The motor has a displacement resolution of 10 nm and a maximum velocity of 0.6 mm/ s. It can drive a 200 g slider whose range is 20 mm. A one-dimensional precision positioning platform is fabricated by using the new hybrid piezoelectric motor. The prototype is made up of two servomotors and two piezoelectric motors, which are controlled automatically by a computer. The positioning range of the platform is 10 cm.
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| 关 键 词： | 精密定位装置 压电电动机 设计 构造 微机械系统 |
| 文章编号： | 1007-0206（2007）01-0025-08 |
| 收稿时间： | 2006-09-11 |
| 修稿时间： | 2006-10-16 |
Design and Fabrication of Hybrid Piezomotor Applied in Precision Positioning Devices |
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| CHENG Dong-ming DUAN Zhi-yong MA Feng-ying GONG Qiao-xia.Design and Fabrication of Hybrid Piezomotor Applied in Precision Positioning Devices[J].Semiconductor Photonics and Technology,2007,47(1):25-32. |
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| Authors: | CHENG Dong-ming DUAN Zhi-yong MA Feng-ying GONG Qiao-xia |
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| Abstract: | The motor's configuration is designed and the dynamic analysis equations based on its simplified model are deduced. A testing system utilizing grating is set up to test this new motor, and the theoretical movement principle for the motor is proved by experiments. The pulse waveforms are applied to drive the motor to move in steps. The motor has a displacement resolution of 10nm and a maximum velocity of 0.6 mm/s. It can drive a 200 g slider whose range is 20 mm. A one-dimensional precision positioning platform is fabricated by using the new hybrid piezoelectric motor. The prototype is made up of two servomotors and two piezoelectric motors, which are controlled automatically by a computer. The positioning range of the platform is 10 cm. |
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| Keywords: | hybrid piezoelectric motors precision positioning devices micro-machining systems dynamic analysis |
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