| Effects of Annealing Temperature on Properties of ZnO Thin Films Grown by Pulsed Laser Deposition |
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| 引用本文： | ZHUANG Hui-zhao XUE Shou-bin XUE Cheng-shan HU Li-jun LI Bao-li ZHANG Shi-ying. Effects of Annealing Temperature on Properties of ZnO Thin Films Grown by Pulsed Laser Deposition[J]. 半导体光子学与技术, 2007, 13(2): 150-154 |
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| 作者姓名： | ZHUANG Hui-zhao XUE Shou-bin XUE Cheng-shan HU Li-jun LI Bao-li ZHANG Shi-ying |
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| 作者单位： | Institute of Semiconductors, Shandong Normal University, Jinan 250014, CHN |
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| 摘 要： | ZnO thin films are deposited on n-Si（111） substrates by pulsed laser deposition（PLD） system. Then the samples are annealed at different temperatures in air ambient and their properties are investigated particularly as a function of annealing temperature. The microstructure, morphology and optical properties of the as-grown ZnO films are studied by X-ray diffraetion（XRD）. atomic force mieroseope（AFM）, Fourier transform infrared spectroscopy（FTIR） and photoluminescence（PL） spectra. The results show that the as- grown ZnO films have a hexagonal wurtzite structure with a preferred c-axis orientation. Moreover, the diameters of the ZnO crystallites become larger and the crystal quality of the ZnO fihns is improved with the increase of annealing temperature.
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| 关 键 词： | ZnO薄膜 脉冲激光沉积 退火温度 晶体性质 |
| 文章编号： | 1007-0206（2007）02-0150-05 |
| 收稿时间： | 2006-10-08 |
| 修稿时间： | 2006-11-18 |
Effects of Annealing Temperature on Properties of ZnO Thin Films Grown by Pulsed Laser Deposition |
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| ZHUANG Hui-zhao,XUE Shou-bin,XUE Cheng-shan,HU Li-jun,LI Bao-li,ZHANG Shi-ying. Effects of Annealing Temperature on Properties of ZnO Thin Films Grown by Pulsed Laser Deposition[J]. Semiconductor Photonics and Technology, 2007, 13(2): 150-154 |
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| Authors: | ZHUANG Hui-zhao XUE Shou-bin XUE Cheng-shan HU Li-jun LI Bao-li ZHANG Shi-ying |
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| Abstract: | ZnO thin films are deposited on n-Si(111) substrates by pulsed laser deposition(PLD) system.Then the samples are annealed at different temperatures in air ambient and their properties are investigated particularly as a function of annealing temperature.The microstructure,morphology and optical properties of the as-grown ZnO films are studied by X-ray diffraction(XRD),atomic force microscope(AFM),Fourier transform infrared spectroscopy(FTIR) and photoluminescence(PL) spectra.The results show that the as-grown ZnO films have a hexagonal wurtzite structure with a preferred c-axis orientation.Moreover,the diameters of the ZnO crystallites become larger and the crystal quality of the ZnO films is improved with the increase of annealing temperature. |
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| Keywords: | annealing temperature ZnO films Si substrate pulsed laser deposition |
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