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Characterization of LiTaO3 thin films fabricated by sol-gel technique
Authors:S Youssef  R Al Asmar  J Podlecki  Y Zaatar
Affiliation:a CEM2—UNIVERSITE MONTPELLIER II—UMR CNRS 5507, Université Montpellier II, Place E. Bataillon, 34095 Montpellier—France
b Département de Sciences et technologie, Faculté des Sciences et de Génie Informatique, Université Saint-Esprit de Kaslik, B.P. 446 Jounieh, Liban
c Laboratoire de Physique des Semi-conducteurs et Energétiques (LPSE), Département de physique, Université Libanaise, Faculté des Sciences II, 90656 Jdeidet—Liban
Abstract:Lithium tantalite (LiTaO3) thin films have been fabricated by sol-gel technique and crystallized by RTA process. The effect of heating temperature on the structural properties of LiTaO3 is investigated. The thin films are characterized by means of X-ray diffraction, Raman spectroscopy and thermal analysis (DCA/DTA). After the optimization of the growth parameters of LiTaO3 prepared by sol-gel processing, the pyroelectric property of LiTaO3 thin films deposited on Si (1 0 0) substrates have been also investigated.
Keywords:Lithium tantalite  Sol-gel  Structural properties  Optical measurements  Thermal analysis  Pyroelectric property
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