| 多光束移相干涉在镀膜平面形貌测量的应用研究 |
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| 引用本文： | 朱小平,杜华,高思田,杨自本. 多光束移相干涉在镀膜平面形貌测量的应用研究[J]. 现代测量与实验室管理, 2006, 14(3): 7-9,18 |
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| 作者姓名： | 朱小平 杜华 高思田 杨自本 |
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| 作者单位： | 中国计量科学研究院,北京,100013 |
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| 摘 要： | 本文以光干涉原理为基础,分析多光束干涉原理特点及其在平面形貌（平面度）测量中应用可能,提出应用移相方法对被测镀高反膜表面进行调制,得到一系列被调制的干涉图样,经计算机对干涉图样进行自动采集和图像解包裹,获得被测表面的三维形貌数据,并通过实际测试验证了该方法的可行性和科学性.
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| 关 键 词： | 多光束干涉 移相 解包裹 三维形貌 |
| 文章编号： | 1005-3387（2006）03-0007-09 |
Application of Multi- wave Interferometer by Phase- shifting Method on Coated Optical Flatness Measurement |
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| ZHU Xiaoping,DU Hua,GAO Sitian,YANG Ziben. Application of Multi- wave Interferometer by Phase- shifting Method on Coated Optical Flatness Measurement[J]. Advanced Measurement and Laboratory Management, 2006, 14(3): 7-9,18 |
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| Authors: | ZHU Xiaoping DU Hua GAO Sitian YANG Ziben |
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| Affiliation: | National Institute of Metrology, Beijing 100013 |
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| Abstract: | Based on laser interferometer theory, Multi -wave interferometer by phase -shifting method is applied on high- reflective coated optical flatness measurement. The multi -wave interference patterns are captured and unwraped by image processing computer,3D surface graph of sample is analyzed and calculated. Experiments indicate that the method is practicable and scientific for high -reflective coated optical flatness measurement. |
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| Keywords: | Multi - wave interferometer phase - shift phase unwrapping 3D surface |
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