| 高控位精度横向模压电微位移器的研究 |
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| 引用本文： | 张望重,陈大任,朱精敏.高控位精度横向模压电微位移器的研究[J].功能材料,2000,31(Z1):108-110. |
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| 作者姓名： | 张望重 陈大任 朱精敏 |
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| 作者单位： | 张望重（中国科学院无机功能材料开放实验室，上海硅酸盐研究所，上海200050）;陈大任（中国科学院无机功能材料开放实验室，上海硅酸盐研究所，上海200050）;朱精敏（浙江大学西溪校区物理系，浙江杭州 310027） |
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| 摘 要： | 介绍了d31横向伸缩模式压电徽位移驱动器的制作过程，应用高稳定的填满钨青铜型压电陶瓷作为该器件制备的基料，利用P-F干涉仪原理测量了电场-位移特性曲线，由此计算了压电常数d31并进行了讨论。该器件具有电控应变(位移)线性度高、滞后量小以及结构简单、制作工艺方便等特点，它在精密光学等技术领域有一定应用价值。
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| 关 键 词： | 压电陶瓷 微位移驱动器 逆压电效应 压电常数 |
| 文章编号： | 1001-9731(2000)zk刊-0108-03 |
| 修稿时间： | 1999年4月23日 |
Study of High Resolution Lateral Piezoelectric Actuator |
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| ZHANG Wangzhong ,CHEN Daren ,ZHU Jingmin.Study of High Resolution Lateral Piezoelectric Actuator[J].Journal of Functional Materials,2000,31(Z1):108-110. |
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| Authors: | ZHANG Wangzhong CHEN Daren ZHU Jingmin |
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| Affiliation: | ZHANG Wangzhong 1,CHEN Daren 1,ZHU Jingmin 2 |
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| Abstract: | The preparation of lateral model (d 31 ) piezoelectric actuator was reported in this paper.A high-steady piezoelectric ceramic with tungsten bronze structure was used as the basic material of the actuator,and its piezoelectric induced displacement curve was measured by using the principle of F-P interferometer as well as the lateral piezoelectric constant (d 31 ). As discussed,this kind of actuator features high linearity and small hysteresis between induced displacement and applied electric field,meanwhile its structure is simple and easy to be fabricated.This actuator should have its applications in field of precise machinery. |
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| Keywords: | piezoelectric ceramics actuator converse piezoelectric effect piezoelectric constant |
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