| 基于模糊理论的半导体制造系统时变多目标生产调度研究 |
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| 引用本文： | 李衍飞,江志斌,张怀.基于模糊理论的半导体制造系统时变多目标生产调度研究[J].高技术通讯,2008,18(7). |
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| 作者姓名： | 李衍飞 江志斌 张怀 |
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| 作者单位： | 上海交通大学工业工程与物流工程系,上海,200240 |
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| 基金项目： | 国家自然科学基金，国家高技术研究发展计划(863计划)，高等学校博士学科点专项科研项目 |
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| 摘 要： | 针对半导体晶圆制造系统(SWFS)调度中的多目标优化和目标时变性问题,提出了一种时变多目标(TVMO)调度算法.基于模糊理论研究了时变模糊集合与多目标重要程度的复杂非线性量化关系,进而研究了SWDS的优化调度方法.所提出的方法兼顾最大产品交期率、最大生产移动量和瓶颈机台最大产能利用率三个目标,根据时变目标权重计算出在制品的加工优先权序列号.大量的仿真实验数据证明,该调度算法能够改善系统多个绩效目标,可为大规模复杂重入型制造系统的科学生产控制与调度提供有效支持.
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| 关 键 词： | 半导体晶圆制造系统(SWFS) 时变多目标(TVMO) 生产计划与调度 模糊控制 |
A study of fuzzy theory-based time-variable multiple-objectives scheduling for semiconductor manufacturing systems |
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| Lee Yenfei,Jiang Zhibin,Zhang Huai.A study of fuzzy theory-based time-variable multiple-objectives scheduling for semiconductor manufacturing systems[J].High Technology Letters,2008,18(7). |
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| Authors: | Lee Yenfei Jiang Zhibin Zhang Huai |
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| Affiliation: | Department of Industrial Engineering & Logistics Management;Shanghai Jiaotang University;Shanghai 200240 |
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| Abstract: | The paper presents a fuzzy theory-based time-variable-multiple-objectives (TVMO) scheduling algorithm for achiev- ing complex semiconductor wafer fabrication systems (SWFS)' multiple-objective optimization and objective time-varia- tion.The fuzzy membership was assigned to describe the complex non-linear relations between the time-variable member- ship set and weight of different objective.Therefore,it provides a potential way to dealing with the scheduling optimiza- tion in the SWFS.Through above method of... |
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