From research to manufacture—The evolution of MOCVD |
| |
| Authors: | Piotr Grodzinski PhD Steven P DenBaars PhD H C Lee PhD |
| |
| Affiliation: | 1. Phoenix Corporate Research Laboratories, Motorola, USA
2. Materials Department, University of California, Santa Barbara, USA
|
| |
| Abstract: | The article provides an overview of the manufacturing capabilities of metalorganic chemical vapor deposition (MOCVD) technology and describes its application to the growth and fabrication of devices in three different material groups: AlGaAs/GaAs, AlInGaP, and AlGaN/GaN. Discussed are GaN blue light-emitting diodes (LEDs), AlInGaP red and yellow LEDs, and AlGaAs/GaAs vertical cavity surface-emitting lasers and high-electron-mobility transistors. Based on these examples, the evolution of MOCVD technology from fundamental materials studies and advanced materials development through the early stages of pilot manufacturing and large-volume manufacturing capabilities is demonstrated. |
| |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ |
|
