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Ion beam induced damage in InP during heavy-ion elastic recoil detection analysis |
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| Authors: | S R Walker P N Johnston I F Bubb W B Stannard Z Jin D N Jamieson S P Dooley D D Cohen and N Dytlewski |
| Affiliation: | a Department of Applied Physics, Royal Melbourne Institute of Technology, GPO Box 2476V, Melbourne 3001, Australia b School of Physics, University of Sydney, Sydney 2000, Australia c School of Physics, University of Melbourne, Parkville 3052, Australia d Australian Nuclear Science and Technology Organisation, Menai 2234, Australia |
| Abstract: | Heavy-Ion Elastic Recoil Detection Analysis (HIERDA) is an analytical technique which has undergone rapid development in the past few years with the availability of high-energy Tandem accelerators for materials science applications. HIERDA has found application in the study of various semiconductor systems, particularly III–V compounds. The technique employs a high-energy heavy-ion analysing beam to knock constituent nuclei from the target material and a time of flight and energy (ToF-E) detector system to extract mass and depth of origin information from these recoiling nuclei. Present work examines the sample damage produced in InP under typical analysis conditions. The depth distribution of damage induced by an 127I analysing beam of varying energy (54–98 MeV) and dose (1013−2 × 1014 ions/cm2) in InP has been examined using RBS channelling, and cross-sectional TEM. |
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