| Y60A单晶炉慢速提拉控制系统设计 |
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| 引用本文： | 梁秀梅. Y60A单晶炉慢速提拉控制系统设计[J]. 电子工业专用设备, 2001, 30(3): 34-37 |
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| 作者姓名： | 梁秀梅 |
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| 作者单位： | 西安理工大学 |
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| 摘 要： | 在单晶生产过程中 ,对单晶提拉速度有十分严格的要求 ,针对实际情况设计并分析了一种实用的、在极低转速下调速的控制系统。用该系统来控制提拉机械 ,具有结构简单、造价低的特点 ,实测表明系统的性能满足生产要求。
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| 关 键 词： | 单晶炉 提拉速度 速度控制系统 |
| 文章编号： | 1004-4507(2001)03-0034-04 |
| 修稿时间： | 2001-05-26 |
Design of low Speed Control System for Y60A Single - crystal Furnace Lifting Mechanism |
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| LIANG Xiu-mei. Design of low Speed Control System for Y60A Single - crystal Furnace Lifting Mechanism[J]. Equipment for Electronic Products Marufacturing, 2001, 30(3): 34-37 |
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| Authors: | LIANG Xiu-mei |
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| Abstract: | The speed of the lifting rod is very important in the manufacturing of single-crystal silicon.A practical stepless speed control system that can be controlled at very low speed.The system is of the specialty of simple constitution and lower final cost.The experimental performance shows that the system can meet the demand of the practical use.It has been manufacturing in series. |
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| Keywords: | single-crystal furnace lifting speed speed control system |
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