金属玻璃微制造技术现状与研究进展

金属玻璃，又称非晶态合金，因具有长程无序、短程有序的独特组织结构而拥有超常的综合性能，是制造微纳器件的理想材料之一，然而，其易过热变性且禀性钝惰硬脆，是一种典型难加工的材料之一。在分析金属玻璃组织结构特点和力学性能的基础上，按等材、减材和增材3种成形方式对金属玻璃的微制造方法与技术进行了综述。介绍各自的加工与成形原理、工艺特点、技术优势、基础应用和发展现状，分析了它们的不足与发展趋势。目前，等材成形是主流的微成形加工方法，是基于非晶材料内在特性的一种成形方式。减材与增材成形加工现阶段仍处于探索之中，工程应用案例较少，有一定的发展潜力。最后展望了金属玻璃微纳制造领域的未来发展方向与研究重点。

Status and Research Progress of Metallic Glass Micro-Manufacturing Technology

Metallic glass, also known as amorphous alloy, is one of the ideal materials for manufacturing micro-nano devices because of the unique structure of long-range disorder and short-range order. However, metallic glass is also one of the typical materials that are difficult to process due to easy thermal denaturation and inert, hard and brittle nature. Based on the analysis of the structural characteristics and mechanical properties of metallic glass, the microfabrication methods and technologies of metallic glass were summarized according to 3 methods of formative manufacturing, subtractive manufacturing, and additive manufacturing. The processing and forming principles, process characteristics, technical advantages, basic applications and development status of 3 methods were introduced and the shortcomings and development trends were analyzed. At present, formative manufacturing is the mainstream micro-forming and processing method based on the intrinsic characteristics of amorphous materials. Subtractive manufacturing and additive manufacturing are still under exploration, with few engineering application cases, but have certain development potential. Finally, the future development direction and research focus of metallic glass micro-nano manufacturing field are prospected.