C2H2流量对反应溅射石墨制备非晶碳膜层结构及性能影响研究

目的 研究反应溅射石墨制备非晶碳过程中乙炔流量变化对非晶碳微观结构、力学性能及摩擦学性能的影响规律。方法 通过在乙炔气氛中反应溅射石墨靶，调控乙炔流量，制备不同结构的非晶碳膜层，采用X射线光电子能谱仪、激光共聚焦拉曼光谱仪分析膜层的微观结构，采用纳米压痕仪表征膜层的力学性能，采用球盘式摩擦磨损试验机、白光干涉仪和光学显微镜表征膜层摩擦学性能。结果 通过反应溅射法制备了致密均匀的非晶碳，分析发现，所有薄膜表层均含有一定量O元素(原子数分数为6.36%~13.86%)。经Ar⁺刻蚀后，大部分膜层的O含量可降至1%以下;随着乙炔流量的增加，膜层的硬度(H)、弹性模量(E)和H³/E²均呈先增后减的趋势，在乙炔流量为10 cm³/min时膜层的硬度和弹性模量达到最大值，分别为27.93、233.55 GPa;摩擦学性能测试结果显示，膜层的平均摩擦因数在0.09~0.11之间，在启动阶段摩擦因数随着氢元素(H)含量的增加呈下降趋势，5 cm³/min试样的膜层的耐磨性最高、磨损量最小，其磨损量为0.72× 10⁻¹⁶ m³/(N.m)。结论 通过调节反应溅射石墨过程中乙炔的流量，可调控非晶碳中sp³/sp²、H含量，进而达到调控非晶碳力学性能、摩擦学性能的目的。

Effects of C2H2 Flow Rate on Structure and Properties of Amorphous Carbon Films Prepared by Reactive Sputtering Graphite

Amorphous carbon film, which combines good chemical inertia, wear resistance and mechanical properties, has been applied in aerospace, automotive, magnetic storage, mechanical processing and other fields. sp3 ratio and H content significantly influence microstructure and tribological properties of amorphous carbon. Especially, the tribological behavior of amorphous carbon with different sp3 ratio and H content varies greatly in the run-in stage under vacuum and air, which means a lot for wear pair design in aerospace equipment components. This work aims to investigate the relationship between film structure and properties, so as to find the optimum processing window.