基于赝电容的高线性度柔性压力传感器研究

基于可逆氧化还原反应的赝电容式柔性压力传感器具备高灵敏性能,可用于微弱压力检测,然而,目前赝电容式柔性压 力传感器线性度较差,只能在有限压力区间内保持较高灵敏度。 为此,本文利用 MXene 材料作为电极,设计了一种内部具有孔 隙且表面粗糙的双尺度随机微结构离子凝胶膜,增加了其压缩过程中的缓冲空间,使凝胶膜应力变形更加均匀,确保了灵敏度 在受压过程中保持稳定。 实验数据表明,传感器在 0 ~ 1 MPa 范围内具有超高的线性度(相关系数 ~ 0. 994),优异的灵敏度 ( ~ 2 133. 7 kPa -1 )、快速的响应和恢复时间(分别为~15 和~23 ms),较低的检测限( ~ 2. 5 Pa)和优异的机械稳定性。 将传感器 用于水下,可高线性检测水深,同时传感器可以高灵敏检测到不同水深下螺旋桨扰动产生的微弱水流变化。

Research on high linearity flexible pressure sensor based on pseudocapacitance

The pseudo capacitive flexible pressure sensor based on reversible redox reaction has high sensitivity and can be used for weak pressure detection. However, currently, the linearity of the pseudo capacitive flexible pressure sensor is poor and can only maintain high sensitivity within a limited pressure range. For this reason, this paper uses MXene material as the electrode to design a double scale random microstructure ionic gel film with pores inside and rough surface, which increases the buffer space during the compression process, makes the stress deformation of the gel film more uniform, and ensures that the sensitivity remains stable during the compression process. Experimental data shows that the sensor has ultra-high linearity ( correlation coefficient ~ 0. 994) in the range of 0 ~ 1 MPa, excellent sensitivity ( ~ 2 133. 7 kPa -1 ), fast response and recovery time ( ~ 15 and~ 23 ms respectively), low detection limit ( ~ 2. 5 Pa), and excellent mechanical stability. The sensor can be used underwater to detect water depth with high linearity, and at the same time, the sensor can detect weak water flow changes caused by propeller disturbances at different water depths with high sensitivity.