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线性调频激光自混合干涉双通道微位移测量方法研究
引用本文:樊毓臻,寇 科,王 晛,焦明星. 线性调频激光自混合干涉双通道微位移测量方法研究[J]. 仪器仪表学报, 2023, 44(10): 22-29
作者姓名:樊毓臻  寇 科  王 晛  焦明星
作者单位:1.西安理工大学机械与精密仪器工程学院
基金项目:国家自然科学基金(61803302)项目资助
摘    要:为了满足工程中一些特殊二维位移测量需求或提高位移测量效率,建立了结构简单紧凑的激光自混合干涉双通道位移测量系统。首先,基于三镜法-珀腔模型给出自混合干涉系统的数学方程。其次,在弱反馈条件下施加线性电流调制,依据自混合信号频率和外部物体距离的线性关系,当两个物体到激光器距离不同时,频域会呈现两个独立的谱峰,分别对其进行相位解算,从而实现自混合双通道位移测量。然后,数值模拟生成了双通道激光自混合信号,根据全相位频谱分析技术对自混合信号两个谱峰的相位进行估算,重构了两个物体位移曲线,给出了仿真验证。最后,搭建了实验系统,进行了自混合干涉双通道位移测量实验,并给出实验测量结果。实验结果表明,该系统可以完全区分两个运动物体,位移测量相对误差优于8.42%。线性调频激光自混合干涉可以实现任意运动规律的双通道位移测量,通过继续分光其测量通道数仍可进一步增加。

关 键 词:激光自混合干涉  全相位频谱分析  双通道位移测量

Study on the dual-channel displacement measurement method using linearly tuned laser self-mixing interference
Fan Yuzhen,Kou Ke,Wang Xian,Jiao Mingxing. Study on the dual-channel displacement measurement method using linearly tuned laser self-mixing interference[J]. Chinese Journal of Scientific Instrument, 2023, 44(10): 22-29
Authors:Fan Yuzhen  Kou Ke  Wang Xian  Jiao Mingxing
Abstract:To meet some special requirements of 2D displacement measurement in engineering or improve the efficiency ofdisplacement measurement, a simple and compact dual-channel displacement measurement system utilizing laser self-mixinginterference is established. Firstly, mathematical equations of the self-mixing interference system are given, which are based on thethree-mirror Fabry-Perot cavity model. Then, under the condition of weak feedback, linear current modulation is applied.According to the linear relationship between the frequency of the self-mixing signal and the distance between the external object,when the distance between the two objects and the laser is different, the frequency domain will present two independent spectralpeaks, and the phase is solved respectively. Therefore, the self-mixing dual-channel displacement measurement is realized. Then,the dual-channel self-mixing signal is generated by numerical simulation. The phase of two spectral peaks of the self-mixing signalis extracted according to the all-phase spectrum analysis technique, and the displacement curves of the two objects arereconstructed accordingly. Finally, an experiment system is established, the dual-channel displacement measurement experimentsare carried out, and the measurement results are exhibited subsequently. The experimental results show that the system cancompletely distinguish two moving objects, and the relative error of displacement measurement is better than 8. 42% . The linearfrequency modulated laser self-mixing interferometry can realize the dual-channel displacement measurement of arbitrary motion,and the number of measuring channels can be further increased by more beam splitting.
Keywords:laser self-mixing interference   all-phase spectral analysis   two-channel displacement measurement
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