| 功率集成电路TID加固环栅器件研究现状综述 |
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| 引用本文： | 罗萍,吴昱操,范佳航,张致远,冯皆凯,赵忠. 功率集成电路TID加固环栅器件研究现状综述[J]. 微电子学, 2023, 53(6): 957-964 |
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| 作者姓名： | 罗萍 吴昱操 范佳航 张致远 冯皆凯 赵忠 |
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| 作者单位： | 电子科技大学 电子薄膜与集成器件全国重点实验室, 成都 611731;电子科技大学 重庆微电子产业技术研究院, 重庆 400060 |
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| 基金项目： | 重庆市自然科学基金资助项目(CSTB2023NSCQMSX0153) |
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| 摘 要： | 总结了标准工艺下功率集成电路中总剂量辐射(TID)加固环栅MOS器件与环栅功率器件的研究现状,归纳了不同结构形态的环栅器件的性能优劣,推荐8字形环栅MOS器件、华夫饼功率器件及回字形LDMOS器件结构用于功率集成电路的TID加固设计。同时,阐述了现有环栅MOS器件等效W/L的建模情况,提出保角变换是环栅MOS器件等效W/L精确建模的重要方法,最后还给出了环栅器件建库的基本流程。
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| 关 键 词： | 总剂量辐射加固 环栅MOS器件 环栅功率MOS 等效W/L建模 环栅器件建库 |
| 收稿时间： | 2023-10-16 |
An Overview of the Research on TID Radiation-Hardened Enclosed Layout Devices for Power Integrated Circuits |
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| LUO Ping,WU Yucao,FAN Jiahang,ZHANG Zhiyuan,FENG Jiekai,ZHAO Zhong. An Overview of the Research on TID Radiation-Hardened Enclosed Layout Devices for Power Integrated Circuits[J]. Microelectronics, 2023, 53(6): 957-964 |
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| Authors: | LUO Ping WU Yucao FAN Jiahang ZHANG Zhiyuan FENG Jiekai ZHAO Zhong |
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| Affiliation: | State Key Lab.of Elec.Thin Films and Integr.Dev., Univ.of Elec.Sci.and Technol.of China, Chengdu 610054, P.R.China;Chongqing Institute of Microelec.Industry Technol., Univ.of Elec.Sci.and Technol.of China, Chongqing 400060 P.R.China |
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| Abstract: | The researches on total ionizing dose radiation-hardened enclosed layout MOS and enclosed layout power device in power integrated circuits under standard processes were summarized. The advantage and disadvantage performances of different structural forms of radiation-hardened enclosed layout devices was analyzed. 8-shaped enclosed layout MOS, waffle typed layout power MOS and rectangular-shape LDMOS were recommended in power integrated circuit design. The modeling of equivalent W/L of existing radiation-hardened enclosed layout MOS devices were elaborated. Conformal transformation was an important way for accurate modeling of equivalent W/L of enclosed layout MOS devices. Finally, the basic process for building a library of enclosed layout devices was provided. |
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| Keywords: | total ionizing dose radiation-hardened enclosed layout MOS device enclosed layout power MOS equivalent W/L modeling building library of enclosed layout device |
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