扫描电镜测定铝钛硼丝物相的影响因素探讨

扫描电镜(SEM)测定常规样品物相定量的准确度已经令人满意,但还有部分特殊的较难检测样品的能谱分析存在较大的误差,需要采用非常规的技术予以分析.实验以铝钛硼丝中的TiB2和TiAl3物相为例研究了参数设置对钨灯丝扫描电镜和场发射扫描电镜检测同时含有轻重元素的物相和中等原子序数以上物相的影响,讨论了加速电压、工作距离等参...

Discussion on influencing factors during the determination of phases in aluminum-titanium-boron wire by scanning electron microscope

Scanning electron microscope(SEM) has satisfactory accuracy for the quantitative determination of phases in conventional samples. However, for some special samples which are hardly detected, the energy spectrum analysis usually has great error, and the unconventional technique should be used for analysis. TiB₂ and TiAl₃ phases in aluminum-titanium-boron wire were used as examples in experiments to investigate the influence of parameter setting on the detection of phases with both light and heavy elements and above medium atomic number by tungsten filament scanning electron microscope and field emission scanning electron microscope. The influence of parameters including accelerating voltage and working distance on the qualitative and quantitative analysis of phases in aluminum-titanium-boron wire was discussed. The results showed that the low accelerating voltage should be adopted for the accurate analysis of elemental contents in phases with both light and heavy elements. For the TiB₂ phase, the minimum accelerating voltage was 6 kV in experiments in order to obtain enough characteristic X-ray counting for Ti element. For the TiAl₃ phase without light elements, the common accelerating voltage in range of 15-20 kV could be used for analysis. For the selection of working distance, it could be adjusted to the optimal working distance of each equipment to improve the detection accuracy since each equipment had fixed detection angle (usually set at 35°).