| 倾斜镜面成像的自动调焦方法 |
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| 引用本文： | 孟永宏,靳刚.倾斜镜面成像的自动调焦方法[J].光电工程,2004,31(12):34-37,42. |
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| 作者姓名： | 孟永宏 靳刚 |
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| 作者单位： | 1. 中国科学院力学研究所国家微重力实验室,北京,100080;中国科学院研究生院,北京,100039
2. 中国科学院力学研究所国家微重力实验室,北京,100080 |
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| 基金项目： | 国家自然科学基金资助项目(90206029,60178033)，中国科学院知识创新工程重大项目(KJCX1-SW-07-03) |
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| 摘 要： | 倾斜镜面成像系统的像面与光轴倾斜,仅利用轴向自动调焦无法实现像面整体清晰。为此提出一种基于图像清晰度判断的自动调焦方法。该方法将轴向调焦与角度调焦相结合,通过步进方式平移和旋转像接收面,利用离焦函数判断聚焦情况,采用数据拟合回归的方法实现了像面整体清晰。该方法在椭偏成像系统的应用结果验证了其有效性,调焦精度达到微米量级。
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| 关 键 词： | 自动调焦 角度调焦 椭偏成像 倾斜镜 |
| 文章编号： | 1003-501X(2004)12-0034-04 |
| 收稿时间： | 2004/4/16 |
An automatic focusing method for the imaging of an illumination-tilted specular-reflection imaging system |
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| MENG Yong-hong,JIN Gang.An automatic focusing method for the imaging of an illumination-tilted specular-reflection imaging system[J].Opto-Electronic Engineering,2004,31(12):34-37,42. |
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| Authors: | MENG Yong-hong JIN Gang |
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| Abstract: | The image plane of illumination-tilted specular reflection imaging system(TSIS) is not perpendicular to the optical axes, which makes auto-focusing in optical axes direction unavailable. In order to solve this problem, an auto-focusing method based on image brightness gradient sharpness function is proposed, which combines auto-focusing in optical axes direction and angle-tilted auto-focusing by step moving and rotating imaging sensor successively. The auto-focusing method can make planar image clearly in whole image plane by using defocusing function and data fitting method. Experiment result from imaging ellipsometry system demonstrates its availability and its precision reaches micron order. |
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| Keywords: | Automatic focusing Angle focusing Imaging ellipsometry Tilt mirror |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
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