| Abstract: | This article describes the development of an XYZ flexure-based micromanipulator, with the features of decoupled kinematic structure, large motion range, high positioning precision, and fast response. The large motion range of flexure mechanisms is quantified by a given definition. Based on the given definition, large motion is achieved in the mechanical design of the XYZ-flexure parallel mechanism (FPM). To ensure high positioning precision and fast dynamic response, a hybrid control algorithm with both position control and vibration control are designed, using the H∞-theory. The controller strongly solves the three common problems of flexure mechanisms simultaneously, including unmodeled uncertainties, the external disturbances and vibration caused by inherent low damping. |
