| 压电陶瓷微位移器特性测试实验研究 |
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| 引用本文： | 李明,薛晨阳,翟成瑞.压电陶瓷微位移器特性测试实验研究[J].纳米科技,2009,6(3):61-64. |
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| 作者姓名： | 李明 薛晨阳 翟成瑞 |
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| 作者单位： | 中北大学电子测试技术国家重点实验室,仪器科学与动态测试教育部重点实验室,山西太原030051 |
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| 摘 要： | 运用光学干涉原理,结合微系统测试分析仪器,分别对压电陶瓷管和压电陶瓷位移器的非线性特性进行测试研究,主要对升压及降压时PZT位移进行测试和电源驱动器闭环状态下的性能测试。
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| 关 键 词： | 压电陶瓷 微位移 压电陶瓷微位移器 闭环 干涉 |
Laboratory Study of Characteristic Testing for Piezoelectric Ceramic Micropositioning |
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| Authors: | LI Ming XUE Chen-yang ZHAI Cheng-rui |
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| Affiliation: | (National Key Laboratory For Electronic Measurement Technology, Key Laboratory of Instrumentation Science Dynamic Measurement North University of China, Taiyuan 030051, China) |
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| Abstract: | Based on the theory of light interference, with the Micro System Analyzer, the article studied and tested the non-linearity character for the Piezoelectric ceramic tube and Piezoelectric ceramic Micro positioning. Primary tested the PZT positioning during increasing voltage and decreasing voltage. Also tested the performance of the power driver under the closed-loop. |
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| Keywords: | piezoelectric ceramic nanopositioning piezoelectric ceramic micropositioning closed loop Interference |
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