一种电容式微加速度计的结构设计和工艺仿真

微硅电容式加速度计是目前微硅加速度传感器发展的主流,本文在硅-玻璃阳极键合工艺同深槽刻蚀工艺相结合的加工技术基础之上设计了一种电容式微加速度计,该结构将两种改变平行板电容量的方式有效的结合在一起,提高了结构的灵敏度并具有较好的线性度.最后,对所设计的结构进行了工艺仿真,通过虚拟工艺仿真结果与设计进行比较,论证了结构的基本可行性.

Design and Virtual Fabrication Process of a new kind of capacitive accelerometer

Capacitive accelerometer can be regarded as the main direction of the development of silicon micro-accelerometer currently. Based on silicon/glass anodic bonding technology and inductively coupled plasma (ICP) high aspect ratio etching ,this paper proposes a new kind of the capacitive accelerometer which combined two methods of changing parallel capacitance effectively. With the knowledge of Virtual Fabrication Process theory, the validity of the design is proved by simulative result of fabrication . This accelerometer fabricated with this technology shows a high sensitivity and has excellent linear coefficient. The design achievement were concluded and The direction of the future work was discussed.