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Large area recrystallization of thick polysilicon films for low cost partial SOI power devices |
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| Authors: | I Bertrand JM Dilhac P Renaud |
| Affiliation: | a FREESCALE Semiconducteurs France SAS, avenue du Général Eisenhower, BP 1029, 31023 Toulouse Cedex, France b LAAS-CNRS, 7 avenue du Colonel Roche, 31077 Toulouse Cedex 4, France c INSA Toulouse, 135 avenue de Rangueil, 31077 Toulouse Cedex 4, France |
| Abstract: | |
| Keywords: | SOI LEGO Silicon recrystallization |
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