| 全永磁ECR离子源研究进展 |
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| 引用本文： | 孙良亭,赵红卫,张雪珍,李锦钰,王辉,马宝华,郭晓虹,尚勇,李锡霞,沙杉,谢祖祺.全永磁ECR离子源研究进展[J].核技术,2009,32(3). |
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| 作者姓名： | 孙良亭 赵红卫 张雪珍 李锦钰 王辉 马宝华 郭晓虹 尚勇 李锡霞 沙杉 谢祖祺 |
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| 作者单位： | 中国科学院近代物理研究所,兰州,730000 |
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| 基金项目： | 国家杰出青年科学基金，国家自然科学基金 |
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| 摘 要： | ECR(电子回旋共振)离子源是产生稳定的强流多电荷态离子束流最有效装置.全永磁ECR离子源因其独特的特点为很多中小型多电荷态离子束流实验平台与离子注入机等系统所采用,为后者产生重复性好、稳定性强的多电荷态离子束流.本文着重论述了中国科学院近代物理研究所研制的几台全永磁多电荷态ECR离子源及其特性与典型性能,如能产生强流高电荷态离子束流的高性能全永磁离子源LAPECR2,能产生强流中低电荷态离子束流的LAPECR1,能产生多电荷态重金属离子柬流的LAPECRl-M等.这些性能稳定的离子源为提高近代物理研究所相关试验平台的性能提供了关键的束流品质保障.
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| 关 键 词： | ECR离子源 全永磁离子源 多电荷态离子 |
The development of all-permanent magnet ECR ion sources at IMP |
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| SUN Liangting,ZHAO Hongwei,ZHANG Xuezhen,LI Jinyu,WANG Hui,MA Baohua,GUO Xiaohong,SHANG Yong,LI Xixia,SHA Shan,XIE Dan.The development of all-permanent magnet ECR ion sources at IMP[J].Nuclear Techniques,2009,32(3). |
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| Authors: | SUN Liangting ZHAO Hongwei ZHANG Xuezhen LI Jinyu WANG Hui MA Baohua GUO Xiaohong SHANG Yong LI Xixia SHA Shan XIE Dan |
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| Affiliation: | Institute of Modern Physics;Chinese Academy of Science;Lanzhou 730000;China;Berkeley Ion Equipment Inc.;Santa Clara;California;USA |
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| Abstract: | Electron Cyclotron Resonance (ECR) ion source is regarded as the most efficient machine to produce stable multiple charge state ion beams. Because of the special characteristics, all-permanent magnet ECR ion sources have been widely adopted around the world to produce stable ion beams of multiple charge state with good repetition and high duty factor for compact research platforms and ion beam implanters. In this paper, all-permanent magnet ECR ion sources developed at IMP are presented, and typical paramet... |
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| Keywords: | ECR ion source All-permanent magnet ion source Multiple charge state ion |
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