微磨料水射流加工脆性玻璃的冲蚀机理研究

微磨料水射流加工技术正成为制造微细结构零件重要的经济高效的微细加工技术。作者在玻璃上进行微磨料水射流微细槽加工的实验基础上,对微磨料水射流加工的表面形貌、材料冲蚀去除机理及加工工艺性能进行了研究。结果表明,玻璃加工表面沿着槽道的方向形成了波纹状形貌,呈非对称或对称的波形,波纹表面很光滑,波纹图案沿着射流冲击区的径向方向发展。由于黏性流体的阻滞作用,脆性玻璃在微磨料水射流加工过程中,在黏性流区域没有发现任何裂纹,材料的冲蚀去除主要是以塑性断裂的方式为主,形成了光滑的加工表面。适当地控制加工工艺参数,在低压下,微磨料水射流加工是一种用于脆性材料上微细通道的加工切实可行的方法,并可获得良好的加工表面质量。

Erosion mechanism of brittle glass by micro-abrasive water jet

Micro abrasive water jet machining(MAJM) is becoming an important machining technique for cost effective micro machining.This paper presents a study of using micro-abrasive water jet for the machining of micro-channels on brittle glasses.The erosion mechanism,surface pattern and process performance are studied.The investigation results showed that waves were developed along the channels,featuring with an asymmetrical or a symmetrical wave patterns.The wave pattern with smooth surface was continuously develo...