An integrated approach for validating micro mechanical systems based on simulation and test

Miniaturization of macroscopic mechanical systems enables the opening of new areas of application for micro technological systems. Because of technological restrictions, especially when applying miniaturized conventional manufacturing techniques, shape and material deviations cannot be scaled down in the same dimension like micro parts. Thus, the long-term objective is to ensure the functioning by appropriate design measures. In doing so, determination of the transfer behavior by modeling and simulation is required. This work presents two ways for ensuring the required properties of micro gears and describes how the results do correlate. The experimental way uses the radial composite inspection as it is used in the macroscopic world. The simulative way deploys a rolling simulation by utilization of finite element analysis. The virtual prototypes are originated on measured real test gears. When comparing experiment and simulation of the rolling behavior, in some short and long wave areas deviations can be recognized. These can be ascribed to the reduction from three to two dimensions when modeling. Other deviations might be based on inaccuracies when mounting into the test rig. In other areas quite good correlations of test and simulation could be ascertained.