单层薄膜的五次多项式椭偏方程的数值分析

采用椭偏法测试的单层均匀透射薄膜的介电常数满足一个五阶多项式方程，来求解 薄膜的折射率和厚度，并且进行了详细的计算和讨论。椭偏仪的测量精度除了与它本身的结构参数以及读数精度有关外，还与被测系统本身有关，精度还取决于衬底的折射率ｎ２，Ψ和Δ的区域及入射角。采用此方法编程可以既快又精确地计算出薄膜的折射率和厚度，取得了令人满意的结果。

Numerical Analysis of Fifth-degree Polynomial Elliptic Equation for the Single Layer Thin Film

This paper is using that dielectric constant of nonabsorbent uniform transparent single layer thin film satisfies am fifth-degree polynomial to extract the refractive index and thickness from the ellipsometric equation. Numerical analysis is given in detail. The measure of precision of elliptic-meter not only depend on the structure parameter and reading precision, but also depend on refraction index of substrate, the range of elliptically polarized angle. Programming with this method to calculate the refractive index and thickness of thin films are both fast and exactly, the calculation result is satisfied.